New fabrication techniques for high quality photonic crystals
نویسندگان
چکیده
منابع مشابه
New fabrication techniques for high quality photonic crystals
We have developed new methods for the fabrication of high quality two-dimensional ~2D! and three-dimensional ~3D! photonic crystals. These techniques involve anisotropic etching and steam oxidation of AlAs mask layers. We have made manufacturable 2D photonic crystals with high aspect ratios for use as micropolarizers and have measured extinction ratios larger than 800 to 1 between TE and TM mod...
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In this paper, we have reported the fabrication of two-dimensional photonic crystals, using a direct writing method in azo polymers. Periodic structures have been fabricated using the interference patterns of two coherent laser beams. The frequency response of the initial one-dimensional structure shows an attenuation of 19.3dB at 1554nm. The twodimensional structure shows 8.3dB and 11.3dB of a...
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We present a simple, versatile technique for the fabrication of large, three-dimensional gap photonic crystals using glancing angle deposition (GLAD). A tetragonal lattice suitable for a large photonic band gap (PBG) can be synthesized by a regular array of square spiral structures grown from a simple, prepatterned substrate using physical vapor deposition and advanced substrate motion. Tetrago...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1997
ISSN: 0734-211X
DOI: 10.1116/1.589723